TopChiller can design and manufacture all types of semiconductor chillers for you
- 0.5Ton to 98Ton cooling capacity
- Temperature control 5℃ to 35℃
- Air cooled&water cooled chiller available
- Built-in SS water tank and water pump
- Smart control energy saving & low maintenance cost
- Remote control and outdoor installation
- Easy operation with full protection devices
- Up to 18 months warranty time since the delivery date
Your Premier Semiconductor Chiller Manufacturer and Supplier in China
Semiconductor chiller designed and manufactured is specially made for cooling the semiconductor machines and chip manufacturing process.
TopChiller® is a professional semiconductor chiller manufacturer and supplier since 1999.
TopChiller with rich experience in making semiconductor chiller because we are always growing with the development of the modern semiconductor industry.
We have a complete range of process chiller in both cooling capacity and models for the semiconductor industry.
Most semiconductor systems have specific needs that require precise temperature control, otherwise resulting in lower defects and greater yields during rapid thermal processing of silicon wafers for the semiconductor industry.
Semiconductor chillers are playing a very significant role that provides accurate temperature control during the semiconductor process and is also important for environmental control and energy conservation.
Semiconductor chiller from TopChiller can supply a steady cooling source which is the best recirculating fluid chiller for the semiconductor industry.
High-quality semiconductor chiller manufactured from TopChiller features outstanding advantages as below:
1. TopChiller has a complete semiconductor chillers lineup from 0.5ton to 98ton that can meet all your cooling capacity requirements.
2. Using top brand compressor features high efficiency, low electricity consumption, low noise, and small vibration.
3. Each semiconductor chiller has #304 SS big volume water tank and built-in high-pressure water pump, no need to install an external water pump for water circulation.
4. Our semiconductor chiller with nonferrous water circuit construction, stainless steel water tank, the stainless steel water pump will make sure the circulating water is clean.
5. Each semiconductor chiller is a compact design that can be installed both indoor and outdoor for waterproof design.
Our semiconductor chillers are the best refrigeration machine for your semiconductors.
Semiconductor chiller has a wide application: including burn-in equipment wafer chuck cooling/heating, ATE (automatic test equipment) test head cooling, laser trimming system cooling, metrology tool cooling, process chamber cooling, and UV cure system cooling.
TopChiller is offering several complete lines of high-quality semiconductor chiller including:
Recirculating refrigerated fluid chillers and non-refrigerated heat exchangers(air cooled 19’’ rack chiller) that can be integrated into the production of silicon wafers for the semiconductor industries and for other chiller systems used for research and development.
Since the year 1999, TopChiller has proven to be a reliable manufacturer of fluid chillers and heat exchanging equipment for a number of semiconductor applications.
If you are searing a good semiconductor chiller supplier in the market? TopChiller is your best choice.
With 20 years of rich experience in semiconductor chiller manufacturing, we can build a standard semiconductor chiller system for you or, if needed, design to customers based on your requirements.
- Data Sheet
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- Main Parts
- Video
Semiconductor Chiller Technical Specifications | ||||||||||||||
Items Model | AC-0.5A | AC-1A | AC-1.5A | AC-2A | AC-2.5A | AC-3A | AC-4A | AC-5A | AC-6A | AC-8AD | AC-10AD | AC-12AD | AC-15AD | |
Cooling capacity | Kcal/h 50HZ/60HZ | 1419 | 2451 | 3182 | 4833 | 5848 | 7181 | 9288 | 11988 | 14534 | 18576 | 23994 | 29068 | 38270 |
1703 | 2941 | 3784 | 5800 | 7018 | 8617 | 11146 | 14386 | 17441 | 22291 | 28793 | 34882 | 45924 | ||
KW 50HZ/60HZ | 1.65 | 2.85 | 3.7 | 5.62 | 6.8 | 8.35 | 10.8 | 13.94 | 16.9 | 21.6 | 27.9 | 33.8 | 44.5 | |
1.98 | 3.42 | 4.4 | 6.74 | 8.2 | 10.02 | 12.96 | 16.73 | 20.28 | 25.92 | 33.48 | 40.56 | 53.4 | ||
Input power | KW | 0.88 | 1.35 | 2 | 2.25 | 2.66 | 3.27 | 4.07 | 5.75 | 6.45 | 8.25 | 11.5 | 12.9 | 17.45 |
Max Current | A | 5.4 | 8.2 | 12 | 13.6 | 6.6 | 8.2 | 10.1 | 13.8 | 15.5 | 20 | 27.9 | 31.3 | 42.4 |
Power source | 1PH~220V/3PH~220V/380V 50HZ/60HZ | 3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V 50HZ/60HZ) | ||||||||||||
Refrigerant | Type | R22/R407C/134a/404A/410A | ||||||||||||
Control | Capillary / thermostatic expansion valve | |||||||||||||
Compressor | Type | Hermetic Rotary | Hermetic scroll ( piston ) | |||||||||||
Power(KW) | 0.45 | 0.89 | 1.3 | 1.73 | 2.1 | 2.7 | 3.5 | 4.55 | 5.25 | 3.5×2 | 4.55×2 | 5.25×2 | 7×2 | |
Condenser | Type | Efficient finned copper tube with aluminum+low noise external rotor fan | ||||||||||||
Air flow (m3/h) | 750 | 1000 | 1500 | 2000 | 2500 | 3000 | 4000 | 5000 | 6000 | 8000 | 10000 | 12000 | 15000 | |
Air blower(KW) | 0.06 | 0.09 | 0.15 | 0.15 | 0.19 | 0.14×2 | 0.14×2 | 0.19×2 | 0.19×2 | 0.25×2 | 0.45×2 | 0.45×2 | 0.6×2 | |
Evaporator | Type | SS Tank coil / shell and tube type / Plate type heat exchanger | ||||||||||||
Chilled water (m3/h) | 0.28 | 0.49 | 0.64 | 0.97 | 1.12 | 1.44 | 1.86 | 2.4 | 2.91 | 3.71 | 4.8 | 5.81 | 7.65 | |
0.34 | 0.59 | 0.76 | 1.16 | 1.4 | 1.72 | 2.23 | 2.88 | 3.49 | 4.46 | 5.76 | 7 | 9.18 | ||
Water tank(L) | 10.6 | 18.3 | 27 | 27 | 50 | 50 | 60 | 60 | 110 | 120 | 200 | 200 | 270 | |
Inlet/outlet pipe (inch) i | 1/2″ | 1/2″ | 1/2″ | 1/2″ | 1″ | 1″ | 1″ | 1″ | 1″ | 1-1/2″ | 2″ | 2″ | 2″ | |
Water pump | Power (kw) | 0.37 | 0.37 | 0.37 | 0.37 | 0.37 | 0.37 | 0.37 | 0.75 | 0.75 | 0.75 | 1.5 | 1.5 | 2.2 |
Max lift(m) | 22 | 22 | 22 | 22 | 22 | 22 | 22 | 30 | 30 | 25 | 25 | 25 | 28 | |
Max flow (m3) | 5.4 | 5.4 | 5.4 | 5.4 | 5.4 | 5.4 | 5.4 | 8.1 | 8.1 | 8.1 | 13.5 | 13.5 | 25.2 | |
Safety protection | Compressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection | |||||||||||||
Dimension | L(mm) | 550 | 550 | 600 | 600 | 720 | 980 | 980 | 1150 | 1150 | 1350 | 1500 | 1500 | 1860 |
W(mm) | 350 | 450 | 500 | 500 | 550 | 520 | 520 | 560 | 560 | 680 | 760 | 760 | 850 | |
H(mm) | 695 | 845 | 985 | 985 | 1350 | 1170 | 1170 | 1215 | 1215 | 1530 | 1660 | 1660 | 1900 | |
Net weight(KG) | 45 | 62 | 85 | 95 | 125 | 152 | 175 | 185 | 215 | 283 | 345 | 382 | 580 | |
Note: The above specifications are according to the following design conditions: 1, 12℃/7℃.Chilled water inlet/outlet temperature 12℃/7℃. 2, 33℃/38℃.Cooling air inlet/outlet temperature 33℃/38℃. We reserve the right to modify the specification without further notice. |
Semiconductor Chiller Technical Specifications | |||||||||||||
Items Model | AC-15AT | AC-20AD | AC-20AF | AC-25AD | AC-25AF | AC-30AD | AC-30AT | AC-40AD | AC-40AF | AC-50AD | AC-50AF | AC-60AD | |
Cooling capacity | Kcal/h 50HZ/60HZ | 36120 | 49966 | 47988 | 58480 | 58136 | 74734 | 74922 | 98040 | 99760 | 119024 | 116960 | 144996 |
43344 | 59959 | 57586 | 70176 | 69763 | 89681 | 89990 | 117648 | 119712 | 142829 | 140352 | 173995 | ||
KW 50HZ/60HZ | 42 | 58.1 | 55.8 | 68 | 67.6 | 86.9 | 87.2 | 114 | 116 | 138.4 | 136 | 168.6 | |
50.4 | 69.72 | 66.96 | 81.6 | 81.12 | 104.28 | 104.64 | 136.8 | 139.2 | 166.08 | 163.2 | 202.3 | ||
Input power | KW | 17.1 | 21.73 | 22 | 25.4 | 24.8 | 33.39 | 33.1 | 44.91 | 43.3 | 57.3 | 54 | 65 |
Max Current | A | 43.2 | 52.7 | 53.3 | 63.7 | 61.3 | 81 | 80.2 | 109 | 106 | 135.5 | 128.5 | 135 |
Power source | 3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V 50HZ/60HZ) | ||||||||||||
Refrigerant | Type | R22/R407C/134a/404A/410A | |||||||||||
Control | Capillary / Thermostatic expansion valve | ||||||||||||
Compressor | Type | Hermetic scroll ( piston ) | |||||||||||
Power(KW) | 4.55×3 | 8.96×2 | 4.55×4 | 10.8×2 | 5.25×4 | 13.62×2 | 8.96×3 | 18.78×2 | 8.96×4 | 23.6×2 | 10.8×4 | 27.4×2 | |
Condenser | Type | Efficient finned copper tube with aluminum+low noise external rotor fan | |||||||||||
Air flow (m3/h) | 15000 | 20000 | 20000 | 25000 | 25000 | 30000 | 30000 | 40000 | 40000 | 50000 | 50000 | 60000 | |
Air blower(KW) | 0.6×2 | 0.78×2 | 0.78×2 | 0.78×2 | 0.78×2 | 0.42×6 | 0.42×6 | 0.6×6 | 0.6×6 | 0.78×6 | 0.78×6 | 0.78×6 | |
Evaporator | Type | SS Tank coil/ shell and tube type/Plate type heat exchanger | |||||||||||
Chilled water (m3/h) | 7.22 | 10 | 9.6 | 11.69 | 11.62 | 14.94 | 15 | 19.6 | 19.95 | 23.8 | 23.4 | 29 | |
8.67 | 11.99 | 11.51 | 14.03 | 13.95 | 17.93 | 18 | 23.52 | 23.94 | 28.6 | 28.1 | 34.8 | ||
Water tank(L) | 270 | 350 | 350 | 350 | 350 | 420 | 420 | 580 | 580 | 580 | 580 | 580 | |
inlet/outlet pipe (inch) | 2″ | 2″ | 2″ | 2-1/2″ | 2-1/2″ | 2-1/2″ | 2-1/2″ | 3″ | 3″ | 3″ | 3″ | 3″ | |
Water pump | Power(kw) | 2.2 | 2.2 | 2.2 | 2.2 | 2.2 | 4 | 4 | 4 | 4 | 5.5 | 5.5 | 5.5 |
Max lift(m) | 28 | 28 | 28 | 28 | 28 | 30 | 30 | 30 | 30 | 32 | 32 | 32 | |
Max flow (m3) | 25.2 | 25.2 | 25.2 | 25.2 | 25.2 | 36 | 36 | 36 | 36 | 40 | 40 | 40 | |
Safety devices | Compressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection | ||||||||||||
Dimension | L(mm) | 1860 | 2020 | 2020 | 2020 | 2020 | 2200 | 2200 | 2350 | 2350 | 2600 | 2600 | 2600 |
W(mm) | 850 | 950 | 950 | 950 | 950 | 1150 | 1150 | 1350 | 1350 | 1500 | 1500 | 1500 | |
H(mm) | 1900 | 2000 | 2000 | 2000 | 2000 | 1980 | 1980 | 2000 | 2000 | 2100 | 2100 | 2100 | |
Net weight(KG) | 580 | 650 | 650 | 810 | 810 | 890 | 890 | 1112 | 1112 | 1320 | 1320 | 1320 | |
Note: The above specifications are according to the following design conditions: 1, Chilled water inlet/outlet temperature 12℃/7℃. 2, Cooling air inlet/outlet temperature 33℃/38℃. We reserve the right to modify the specification without further notice. |