Your Reliable Semiconductor Chiller Supplier and Manufacturer Over 20 Years
TopChiller is manufacturing high quality semiconductor chillers to provide full cooling solutions for your semiconductor facilities

TopChiller can design and manufacture all types of semiconductor chillers for you

  • 0.5Ton to 98Ton cooling capacity
  • Temperature control 5℃ to 35℃
  • Air cooled&water cooled chiller available
  • Built-in SS water tank and water pump
  • Smart control energy saving & low maintenance cost
  • Remote control and outdoor installation
  • Easy operation with full protection devices
  • Up to 18 months warranty time since the delivery date

Your Premier Semiconductor Chiller Manufacturer and Supplier in China

Semiconductor chiller designed and manufactured is specially made for cooling the semiconductor machines and chip manufacturing process.

TopChiller® is a professional semiconductor chiller manufacturer and supplier since 1999.

TopChiller with rich experience in making semiconductor chiller because we are always growing with the development of the modern semiconductor industry.

We have a complete range of process chiller in both cooling capacity and models for the semiconductor industry.

Most semiconductor systems have specific needs that require precise temperature control, otherwise resulting in lower defects and greater yields during rapid thermal processing of silicon wafers for the semiconductor industry.

Semiconductor chillers are playing a very significant role that provides accurate temperature control during the semiconductor process and is also important for environmental control and energy conservation.

Semiconductor chiller from TopChiller can supply a steady cooling source which is the best recirculating fluid chiller for the semiconductor industry.

High-quality semiconductor chiller manufactured from TopChiller features outstanding advantages as below:

1. TopChiller has a complete semiconductor chillers lineup from 0.5ton to 98ton that can meet all your cooling capacity requirements.

2. Using top brand compressor features high efficiency, low electricity consumption, low noise, and small vibration.

3. Each semiconductor chiller has #304 SS big volume water tank and built-in high-pressure water pump, no need to install an external water pump for water circulation.

4. Our semiconductor chiller with nonferrous water circuit construction, stainless steel water tank, the stainless steel water pump will make sure the circulating water is clean.

5. Each semiconductor chiller is a compact design that can be installed both indoor and outdoor for waterproof design.

Our semiconductor chillers are the best refrigeration machine for your semiconductors.

Semiconductor chiller has a wide application: including burn-in equipment wafer chuck cooling/heating, ATE (automatic test equipment) test head cooling, laser trimming system cooling, metrology tool cooling, process chamber cooling, and UV cure system cooling.

TopChiller is offering several complete lines of high-quality semiconductor chiller including:

Recirculating refrigerated fluid chillers and non-refrigerated heat exchangers(air cooled 19’’ rack chiller) that can be integrated into the production of silicon wafers for the semiconductor industries and for other chiller systems used for research and development.

Since the year 1999, TopChiller has proven to be a reliable manufacturer of fluid chillers and heat exchanging equipment for a number of semiconductor applications.

If you are searing a good semiconductor chiller supplier in the market? TopChiller is your best choice.

With 20 years of rich experience in semiconductor chiller manufacturing, we can build a standard semiconductor chiller system for you or, if needed, design to customers based on your requirements.

Semiconductor Chiller Technical Specifications
Items                              ModelAC-0.5AAC-1AAC-1.5AAC-2AAC-2.5AAC-3AAC-4AAC-5AAC-6AAC-8ADAC-10ADAC-12ADAC-15AD
Cooling capacityKcal/h
50HZ/60HZ
1419245131824833584871819288119881453418576239942906838270
17032941378458007018861711146143861744122291287933488245924
KW
50HZ/60HZ
1.652.853.75.626.88.3510.813.9416.921.627.933.844.5
1.983.424.46.748.210.0212.9616.7320.2825.9233.4840.5653.4
 Input powerKW0.881.3522.252.663.274.075.756.458.2511.512.917.45
Max CurrentA5.48.21213.66.68.210.113.815.52027.931.342.4
Power source1PH~220V/3PH~220V/380V 50HZ/60HZ3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V   50HZ/60HZ)
RefrigerantTypeR22/R407C/134a/404A/410A
ControlCapillary / thermostatic expansion valve
CompressorTypeHermetic RotaryHermetic scroll ( piston )
Power(KW)0.450.891.31.732.12.73.54.555.253.5×24.55×25.25×27×2
CondenserType Efficient finned copper tube with aluminum+low noise external rotor fan
Air flow (m3/h)750100015002000250030004000500060008000100001200015000
Air blower(KW)0.060.090.150.150.190.14×20.14×20.19×20.19×20.25×20.45×20.45×20.6×2
EvaporatorTypeSS Tank coil / shell and tube type / Plate type heat exchanger
 Chilled water
(m3/h)
0.280.490.640.971.121.441.862.42.913.714.85.817.65
0.340.590.761.161.41.722.232.883.494.465.7679.18
Water tank(L)10.618.3272750506060110120200200270
Inlet/outlet pipe
(inch) i
1/2″1/2″1/2″1/2″1″1″1″1″1″1-1/2″2″2″2″
Water pumpPower (kw)0.370.370.370.370.370.370.370.750.750.751.51.52.2
Max lift(m)22222222222222303025252528
Max flow (m3)5.45.45.45.45.45.45.48.18.18.113.513.525.2
Safety protectionCompressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection
Dimension L(mm)550550600600720980980115011501350150015001860
W(mm)350450500500550520520560560680760760850
H(mm)695845985985135011701170121512151530166016601900
Net weight(KG)45628595125152175185215283345382580
Note:
The above specifications are according to the following design conditions:
1, 12℃/7℃.Chilled water inlet/outlet temperature 12℃/7℃.
2, 33℃/38℃.Cooling air inlet/outlet temperature 33℃/38℃.
We reserve the right to modify the specification without further notice.
Semiconductor Chiller Technical Specifications
Items                               ModelAC-15ATAC-20ADAC-20AFAC-25ADAC-25AFAC-30ADAC-30ATAC-40ADAC-40AFAC-50ADAC-50AFAC-60AD
Cooling capacityKcal/h
50HZ/60HZ
361204996647988584805813674734749229804099760119024116960144996
43344599595758670176697638968189990117648119712142829140352173995
KW
50HZ/60HZ
4258.155.86867.686.987.2114116138.4136168.6
50.469.7266.9681.681.12104.28104.64136.8139.2166.08163.2202.3
Input powerKW17.121.732225.424.833.3933.144.9143.357.35465
Max CurrentA43.252.753.363.761.38180.2109106135.5128.5135
Power source3PH~380V/415V/480V~50HZ/60HZ(3PH~200V/220V   50HZ/60HZ)
RefrigerantTypeR22/R407C/134a/404A/410A
ControlCapillary / Thermostatic expansion valve
CompressorTypeHermetic scroll ( piston )
Power(KW)4.55×38.96×24.55×410.8×25.25×413.62×28.96×318.78×28.96×423.6×210.8×427.4×2
CondenserTypeEfficient finned copper tube with aluminum+low noise external rotor fan
Air flow (m3/h)150002000020000250002500030000300004000040000500005000060000
Air blower(KW)0.6×20.78×20.78×20.78×20.78×20.42×60.42×60.6×60.6×60.78×60.78×60.78×6
EvaporatorTypeSS Tank coil/ shell and tube type/Plate type heat exchanger
Chilled water
(m3/h)
7.22109.611.6911.6214.941519.619.9523.823.429
8.6711.9911.5114.0313.9517.931823.5223.9428.628.134.8
Water tank(L)270350350350350420420580580580580580
 inlet/outlet pipe
(inch)
2″2″2″2-1/2″2-1/2″2-1/2″2-1/2″3″3″3″3″3″
Water pumpPower(kw)2.22.22.22.22.244445.55.55.5
Max lift(m)282828282830303030323232
Max flow (m3)25.225.225.225.225.236363636404040
Safety devicesCompressor inner protection, over current protection, high/low pressure protection, over temperature protection, flow rate protection, phase sequence/phase missing protection, low level coolant protection, anti freezing protection, exhaust overheat protection
DimensionL(mm)186020202020202020202200220023502350260026002600
W(mm)8509509509509501150115013501350150015001500
H(mm)190020002000200020001980198020002000210021002100
Net weight(KG)58065065081081089089011121112132013201320
Note:
The above specifications are according to the following design conditions:
1, Chilled water inlet/outlet temperature 12℃/7℃.
2, Cooling air inlet/outlet temperature 33℃/38℃.
We reserve the right to modify the specification without further notice.

Why TopChiller is Your Reliable Semiconductor Chiller Manufacturer and Supplier In China?

Experienced in Semiconductor Chiller
Over 20 years rich experience of semiconductor chiller manufacturing offering a complete of semiconductor chiller designs and models to meet your requirements.
Full Solutions Provider
Our services including: semiconductor chiller requirement communication, analysis, designing, manufacturing, quality controller, delivery, Keep advising not just manufacturing.
Reduce Your Costs
With rich experience of making semiconductor chillers for your industrial applications can help to work out the correct semiconductor chiller suitable for your needs,our high quality semiconductor chillers will save your costs
Top Quality Control
We always take good care of your semiconductor chiller order from design,raw material purchasing,manufactured,testing and delivery to make sure all semiconductor chiller making process are under control.
Global Chiller Shipment
No matter which country you are from, just tell your nearest seaport or airport name, we can arrange your semiconductor chiller order at fastest shipping even can do door to door delivery.
No Worries Service
World business trip/semiconductor chiller related exhibitions&fairs 2-3 times yearly can settle face to face meeting, 24*7*365 online service service with fast feedback.

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TopChiller: Your Premier Semiconductor Chiller Manufacturer and Supplier in China

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